Multibeam Electron Source using MEMS Electron Optical Components
نویسندگان
چکیده
منابع مشابه
Multibeam Electron Source using MEMS Electron Optical Components
Recent developments in electron beam equipment have given rise to ever more complex electron optical (EO) designs. Until now these designs were realized using standard workshop techniques like drilling, turning etc. With the need for even more complex designs to advance electron optics, we use the possibilities of manufacturing EO components with MEMS fabrication techniques. This leads to diffe...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/180